\" Silicon quantum dots: the future of electronics and photonics?\"
- 일 시 : 2008년 08월 28일 목요일 16:00-17:00
- 장 소 : 서울대학교 반도체공동연구소 설계연구관 제2교육실
- 연 사 : Shunri Oda (Professor, Tokyo Institute of Technology)
Quantum dot structures, where electrons are confined three-dimensionally in the sub-10 nm scale, show characteristics quite different from conventional bulk structures. Recent progress in the fabrication technology of silicon nanostructures has made possible observations of novel electrical and optical properties of silicon quantum dots, such as single electron tunneling, ballistic transport, visible photoluminescence and electron emission. Electron transport and photonic properties of silicon nanocrystals prepared by plasma processes will be presented with particular emphasis on the fabrication of monodispersed silicon nanocrystals, high-density assembly of silicon quantum dots. I will also discuss applications of silicon quantum dots to nanodot memory for future Tera bit non-volatile memory devices, and silicon photonic devices for future ULSI interconnections.
Shunri Oda received the B. Sc degree in physics, the M. Eng. and Dr. Eng. degree from Tokyo Institute of Technology in 1974, 1976 and 1979, respectively. He is a Professor in Department of Physical Electronics and Quantum Nanoelectronics Research Center, Tokyo Institute of Technology.
His current research interests include fabrication of silicon quantum dots by pulsed plasma processes, single electron tunneling devices based on nanocrystalline silicon, ballistic transport in silicon nanodevices, silicon based photonic devices, and high-k gate oxide ultrathin films prepared by atomic layer MOCVD. He has authored approximately 200 international technical and more than 230 conference papers including more than 70 invited papers. He edited a book (with D. Ferry) “Silicon Nanoelectronics” (CRC Press, 2006).
Prof. Oda is a member of Electrochemical Society, Materials Research Society, and a Fellow of Japan Society for Applied Physics. He is a Distinguished Lecturer of IEEE Electron Devices Society.
담당교수 : 전기컴퓨터공학부 박병국 (문의 : 이현유, Tel. 880-1797 )